| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser processing device which is easy to maintain and can control coherence, a laser processing method using the same, and an electronic device using the laser processing method. <P>SOLUTION: The laser processing device is characterized by including: a seed light source for emitting seed light of infrared wavelength band; a first fiber amplifier supplied with the seed light to emit first laser beam; a second fiber amplifier supplied with the seed light to emit second laser beam; a first wavelength conversion part which converts wavelength of the first laser beam into a wavelength range of ultraviolet light to visible light; a second wavelength conversion part which converts wavelength of the second laser beam into the wavelength range of ultraviolet light to visible light; and an optical irradiation part which combines the first and second wavelength-converted laser beams into a composite beam, wherein the first laser beam and second laser beam are combined in a state where at least one of center wavelength, optical path length, phase, and projection timing is different. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
