| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of easily deciding whether a processing liquid in a storage tank needs to be replaced even when using three or more kinds of processing liquids including circulation type and non-circulation type processing liquids. SOLUTION: The substrate processing apparatus selectively performs one of a first supply operation to supply a chemical B, a second supply operation to supply circulating water, and a third supply operation to supply a chemical A based upon data of a recipe, decides whether the chemical B or circulating water reserved in the storage tank 16 is discharged based upon the recipe data and reserved liquid data, and rewrites reserved liquid data when the chemical B or circulating water reserved in the storage tank 16 is discharged. COPYRIGHT: (C)2009,JPO&INPIT
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