| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo vacuum pump enabling miniaturization and light weight by stably performing high speed rotation by raising the natural frequency of a rotor as a whole. SOLUTION: The turbo vacuum pump includes an air suction part 23A for sucking gas in the axial direction, a plurality of rotary impellers 70, 80, a fixed impeller 71 disposed facing the plurality of the rotary impellers, a discharging part 50 for discharging gas sucked from the air suction part, and a rotary shaft 21 for rotating the plurality of the rotary impellers. The plurality of the rotary impellers include a first turbine impeller 70 of at least one stage fixed to the air suction part side end face 15 of the rotary shaft for discharging the sucked gas in the axial direction, and a second turbine impeller 80 of at least one stage, fixed to the rotary shaft provided through the second turbine impeller and disposed at a latter part of the first turbine impeller 80. COPYRIGHT: (C)2009,JPO&INPIT
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