发明名称 |
ANALYZING SURFACE STRUCTURE USING SCANNING INTERFEROMETRY |
摘要 |
A method includes comparing a scanning interferometry signal obtained for a location of a test object to each of multiple model signals corresponding to different model parameters for modeling the test object, wherein for each model signal the comparing comprises calculating a correlation function between the scanning interferometry signal and the model signal to identify a surface-height offset between the scanning interferometry signal and the model signal and, based on the identified surface-height offset, calculating a height-offset compensated merit value indicative of a similarity between the scanning interferometry signal and the model signal for a common surface height. The method further includes, based on the respective merit values for the different model signals, determining a test object parameter at the location of the test object. |
申请公布号 |
WO2009079334(A3) |
申请公布日期 |
2009.08.20 |
申请号 |
WO2008US86416 |
申请日期 |
2008.12.11 |
申请人 |
ZYGO CORPORATION;DE GROOT, PETER;DE LEGA, XAVIER, COLONNA |
发明人 |
DE GROOT, PETER;DE LEGA, XAVIER, COLONNA |
分类号 |
G01B11/00;G01B9/02;G01B11/03;G01B11/06;G01B11/24;G06F7/00 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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