| 摘要 |
A manufacturing method of a backing plate, the packing plate, a spatter cathode, a spattering device, and a washing method of the backing plate are provided to improve adhesion of a film which is laminated on a blast processing part. A manufacturing method of a backing plate includes the following steps of: preparing a backing plate main body(ST1); performing blast treatment on a part of a forming region in which a spattering target is formed(ST2); washing a bluster processing part with ultrasonic waves(ST3); washing the bluster processing part with a cleansing agent(ST4); and washing the bluster processing part with ultrasonic waves again(ST5). The bluster processing part has the surface roughness 1 ~ 4mum.
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