| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum stage device that can be inexpensively configured with high accuracy. SOLUTION: The vacuum stage device has a stage 11, an air spindle 4 rotating the stage 11, and a box 20 storing the air spindle 4, all in a vacuum chamber 1, and a sliding shaft 3 having a circular cross section and moving the stage 11 in one axial direction, which is disposed as extending from the inside of the vacuum chamber 1 to the outside, wherein the sliding shaft 3 extended from the box 20 to both sides to the outside of the vacuum chamber 1 along a straight line gives a unit structure, and only one unit structure is provided in the stage device. The stage device is provided with a rotation regulating mechanism 40 configured to regulate rotation of the sliding shaft 3 of the vacuum stage device and as well as to float by static pressure with respect to the floor. COPYRIGHT: (C)2009,JPO&INPIT
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