发明名称 NONVOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>A nonvolatile semiconductor storage device (100) is provided with a substrate (102) having a transistor (101) formed thereon; a first interlayer insulating layer (103) formed on the substrate to cover the transistor; a first contact plug (104) or a second contact plug (105), which is formed on the first interlayer insulating layer and is electrically connected to a drain electrode (101a) or a source electrode (101b) of the transistor; a resistance variable layer (106) formed to cover at least a part of the first contact plug; a first wiring (107) formed on the resistance variable layer; and a second wiring (108) formed to cover at least a part of the second contact plug. An end surface of the resistance variable layer and an end surface of the first wiring are on the same surface.</p>
申请公布号 WO2009101785(A1) 申请公布日期 2009.08.20
申请号 WO2009JP00501 申请日期 2009.02.09
申请人 PANASONIC CORPORATION;MIKAWA, TAKUMI;KAWASHIMA, YOSHIO;ARITA, KOJI;NINOMIYA, TAKEKI 发明人 MIKAWA, TAKUMI;KAWASHIMA, YOSHIO;ARITA, KOJI;NINOMIYA, TAKEKI
分类号 H01L27/10;H01L45/00;H01L49/00 主分类号 H01L27/10
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