DIAMOND-LIKE CARBON FILM FORMING APPARATUS AND METHOD FOR FORMING DIAMOND-LIKE CARBON FILM

摘要

Disclosed are a diamond-like carbon film forming apparatus and a method for forming a diamond-like carbon film. The diamond-like carbon film forming apparatus employing a plasma chemical vacuum deposition method includes a single-pulse DC power supply (6) and a superimposing DC power supply (26), and/or a high-frequency power supply (7)for performing application between a member (4) having a base (2) encompassed with a conductive mask material (3) and a wall of a chamber (5) of the diamond-like carbon film forming apparatus, wherein a negative single pulse voltage from the single-pulse DC power supply (6) and the superimposing DC power supply (26), or a high-frequency voltage from the high-frequency power supply (7) is selectively applied to the member (4) to form a diamond-like carbon film of segment structure on the base (2) encompassed with the mask material (3).