| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an adhesion rubber sheet for a substrate carrying tool, which has sufficiently-high adhesion to a substrate and support board being an adherend even at a solder reflow temperature while being a fluororubber-based elastomer sheet having conductivity, wherein the adhesion rubber will surely fix and hold the substrate and will not be peeled off from the support board when subjected to a solder reflow process. <P>SOLUTION: The adhesion rubber sheet 10 is fixed on the support board 20 to constitute a substrate carrying tool, wherein the adhesion rubber sheet includes: 100 pts.mass fluororubber; 0.2-0.6 pt.mass organic peroxide; 0.5-1.5 pts.mass co-cross-linking agent; and 1.0-5.0 pts.mass carbon nanotube. A rubber compound having polymer purity of ≥90.0 mass% can be obtained by molding process. <P>COPYRIGHT: (C)2009,JPO&INPIT |
