SUPPORT FOR USE OF FRAGILE MEMBER, AND TREATMENT METHOD OF THE FRAGILE MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a fragile member support capable of stably carrying a fragile member such as a semiconductor wafer and transferring the member to a subsequent process without damaging it after required treatment is completed when conveying the fragile material or machining the wafer such as polishing the rear face. SOLUTION: The fragile member support used to carry the fragile member in treating the member includes: a surface protective sheet including an aperture having a diameter smaller than an outer diameter of the fragile member to be carried and not having an adhesive layer formed and an adhesive layer for surrounding the aperture; and a rigid plate stuck to a surface of the sheet where the adhesive layer is not formed. COPYRIGHT: (C)2009,JPO&INPIT