| 摘要 |
To prevent a surface of a workpiece from being scratched and allow the workpiece to be reliably held even in sucking and holding a workpiece having a curved portion or an inclined portion. A support member 4 is provided on a lower portion of a cylindrical portion 2 provided with a piston member 6 therein, a small diameter hole 10 and a large diameter hole 11 through which a piston rod 8 is passed are formed in the support member 4, and a vacuum cup 16 is mounted to a tip of the piston rod 8. A first suction hole 13 is provided from a side surface of the support member 4 to the large diameter hole 11, a third suction hole 17 opening into the vacuum cup 16 is provided at the center of the piston rod 8, and a second suction hole 18 that provides communication between the large diameter hole 11 and the third suction hole 17 is provided. A communication area of the second suction hole 18 communicating with the third suction hole 17 is smaller than a communication area of the large diameter hole 11 communicating with the piston chamber 5. |
