| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and device of an electro-optic device, exactly detecting whether an undivided part exists on one large substrate after dividing one large substrate when the electro-optic device is segmented from an object to which a pair of large substrates are stuck together. SOLUTION: The present invention is the inspection method of the electro-optic device obtained by dividing a large stuck substrate constituted by sticking a first large substrate and a second large substrate together along a plurality of predetermined division scheduled lines, and is characterized in that the curvature shape of the large stuck substrate is measured after a first division process of dividing either one of the first large substrate or the second large substrate of the large stuck substrates along the plurality of predetermined division scheduled lines, and whether undivided part exists in the first division process based on the curvature shape. COPYRIGHT: (C)2009,JPO&INPIT
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