发明名称 METALLIC MEMBER, PRODUCING APPARATUS OF DLC FILM, AND PRODUCING METHOD OF METALLIC MEMBER
摘要 PROBLEM TO BE SOLVED: To provide a metallic member provided with a DLC (Diamond like Carbon) film capable of having both of areas excellent in hardness and areas excellent in lubricity while localizing them in the same surface. SOLUTION: The metallic member 10 is one that is arranged with a DLC film 12 on a metal substrate 11 containing at least iron, wherein the DLC film 12 has a peak caused by graphite observed in the wave number range of 1,550-1,600 [cm<SP>-1</SP>] in its Raman spectrum, in the film surface the peak intensity exists plurally and in a mixed state, and there is a difference between the maximum peak intensity and the minimum peak intensity by one digit or more. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009184859(A) 申请公布日期 2009.08.20
申请号 JP20080024443 申请日期 2008.02.04
申请人 MEIJI UNIV 发明人 UEKUSA SHINICHIRO;MURATA YOSHIMI
分类号 C30B29/04;B01J23/30;C01B31/02;C23C16/27;C23C16/44 主分类号 C30B29/04
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