发明名称 |
Method for manufacturing a mirror device by means of a plurality of sacrificial layers |
摘要 |
A method for manufacturing a device comprising an elastic member on a substrate includes steps of: forming a sacrificial layer by forming a plurality of sacrificial sub-layers on the substrate; forming a plate member in or on the sacrificial layers connected to the substrate and substantially parallel to a top surface of the substrate; and removing the sacrificial sub-layers after forming the plate member by removing the sacrificial sub-layers in an order different from the reverse order of forming the sacrificial sub-layers.
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申请公布号 |
US2009206052(A1) |
申请公布日期 |
2009.08.20 |
申请号 |
US20090381587 |
申请日期 |
2009.03.12 |
申请人 |
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发明人 |
MAEDA YOSHIHIRO;ISHII FUSAO;WATANABE KAZUHIRO;ICHIKAWA HIROTOSHI |
分类号 |
B29D11/00 |
主分类号 |
B29D11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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