发明名称 Method for manufacturing a mirror device by means of a plurality of sacrificial layers
摘要 A method for manufacturing a device comprising an elastic member on a substrate includes steps of: forming a sacrificial layer by forming a plurality of sacrificial sub-layers on the substrate; forming a plate member in or on the sacrificial layers connected to the substrate and substantially parallel to a top surface of the substrate; and removing the sacrificial sub-layers after forming the plate member by removing the sacrificial sub-layers in an order different from the reverse order of forming the sacrificial sub-layers.
申请公布号 US2009206052(A1) 申请公布日期 2009.08.20
申请号 US20090381587 申请日期 2009.03.12
申请人 发明人 MAEDA YOSHIHIRO;ISHII FUSAO;WATANABE KAZUHIRO;ICHIKAWA HIROTOSHI
分类号 B29D11/00 主分类号 B29D11/00
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