METHOD AND APPARATUS FOR MANUFACTURING THIN FILM PHOTOELECTRIC CONVERSION MODULE

摘要

A method for manufacturing a thin film photoelectric conversion module includes a step of forming a plurality of photoelectric conversion elements (D1-D6) which are connected in series on a substrate; and a step of reversely biasing at the same time photoelectric conversion element groups which are respectively composed of a plurality of photoelectric conversion elements (D) and positioned with one or a plurality of photoelectric conversion elements (D) in between, by respectively applying a plurality of voltages electrically insulated from each other.