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发明名称
EISENSILICID-SPUTTERTARGET UND HERSTELLUNGSVERFAHREN DAFÜR
摘要
申请公布号
DE60328301(D1)
申请公布日期
2009.08.20
申请号
DE20036028301
申请日期
2003.09.01
申请人
NIPPON MINING & METALS CO. LTD.
发明人
ODA, KUNIHIRO;SUZUKI, RYO
分类号
B22F9/08;C23C14/34;B22F1/00;B22F3/105;B22F3/14;B22F3/15;C01B33/06;C04B35/58;C04B35/645;C22C33/02;C22C38/00;C23C14/35
主分类号
B22F9/08
代理机构
代理人
主权项
地址
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