发明名称 Transport device for horizontal vacuum coating plant, comprises rotatably arranged transport rollers sequentially arranged in a horizontal plane and directed diagonally to transport direction, and a gas barrier element
摘要 #CMT# #/CMT# The transport device comprises rotatably arranged transport rollers (4) sequentially arranged in a horizontal plane and directed diagonally to transport direction, a chamber wall (11), and a gas barrier element (9) arranged between the chamber wall and the transport roller. The gas barrier element has a sealing element for the production of a linear contact with the transport roller. The transport rollers are directly arranged in a row without module, which is arranged between the transport rollers. A collection element is arranged beneath the transport roller. #CMT#USE : #/CMT# Device for transporting substrate useful for horizontal vacuum coating plant. #CMT#ADVANTAGE : #/CMT# The transport device can be easily and economically constructed in simple manner, ensures safe and rapid transportation of the substrate without danger of bending and reduces the risk of deformation. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The figure shows a schematic representation of a horizontal vacuum coating plant. 4 : Transport roller 5 : Substrate 8 : Panel 9 : Gas barrier element 11 : Chamber wall.
申请公布号 DE102008008320(A1) 申请公布日期 2009.08.20
申请号 DE20081008320 申请日期 2008.02.07
申请人 VON ARDENNE ANLAGENTECHNIK GMBH 发明人 KRAUSE, JOCHEN;MUELLER, UWE
分类号 C23C14/56;C23C16/54 主分类号 C23C14/56
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