| 摘要 |
PROBLEM TO BE SOLVED: To provide a pure water production method and a device therefor which can fixedly stabilize the temperature of produced treated water (pure water) at high precision, and in which energy consumption is reduced. SOLUTION: Raw water discharged from a raw water tank 1 and pretreated by a pretreatment tank 2 is successively passed through first to fourth heat exchangers 41, 42, 43, 44 for heating with a feed pump 3, is thereafter passed through a deaeration apparatus 5 and a heat exchanger 52 for cooling, is received by a water receiving tank 6, and is fed to a RO (reverse osmosis) apparatus 7 to be subjected to separation treatment of pure water and the treated water after the treatment is fed to a lithography process or the like. By a control section 20, the flow rate of brine fed from the RO apparatus 7 to the first heat exchanger 41 for heating, the flow rate of a heat medium fed from a refrigerator 101 to the second heat exchanger 42 for heating, the flow rate of the heat medium fed from a compressor apparatus 102 to the third heat exchanger 43 for heating, and the flow rate of a heat medium fed from a boiler apparatus 103 to the fourth heat exchanger 44 for heating are controlled based on the temperature of the raw water in a raw water tank 1 and the temperature of the raw water in a water receiving tank 6. COPYRIGHT: (C)2009,JPO&INPIT
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