| 摘要 |
PROBLEM TO BE SOLVED: To exactly control routing of light via a free space in a MEMS optical bench. SOLUTION: The optical bench (102) transmit light through the free space in a plurality of trenches formed in the bench. Each of the trenches is formed by deep ion reactive etching and defined by two opposing sidewalls, such that the free space exists between the opposing sidewalls. An exemplary embodiment has the first trench (104) operable to receive the beam of light and operable to transmit the beam of light through the free space in the first trench (104); an angled reflection sidewall (108) operable to receive the beam of light routed through the first trench (104) and operable to reflect at least a portion of the beam of light; and the second trench (106) operable to receive the portion of the beam of light reflected from the angled reflection sidewall (108) and operable to route the portion of the beam of light through the free space in the second trench (106). COPYRIGHT: (C)2009,JPO&INPIT
|
