发明名称 METHOD AND DEVICE FOR POSITIONING AND ALIGNING AN OBJECT RELATIVELY TO OR WITH A SUBSTRATE AND USE THEREOF
摘要 The invention relates to a method and a device for positioning or aligning an object (1) relatively to or with a substrate (13), wherein light is beamed on the object (1) especially in the region of at least one marking (3) of the object (1), which is to be positioned, and light, reflected from the object (1) to be positioned, especially from the marking (3) and/or the substrate (13), is recorded in a recording device (7) and optionally evaluated and the position of the object (1) is determined on the basis of the reflected radiation, recorded and optionally evaluated, and/or the position or alignment of the object (1) is corrected and provisions are made so that the light, used for the irradiation, is converted, especially by using a luminescing material (15) in the region of the marking (3), into light of a different wavelength and light of the different wavelength is recorded in the recording device (7) and optionally subjected to an evaluation, by means of which a highly precise positioning and alignment of the object (1), which is to be positioned, can be achieved, especially with a decrease of objects, defectively processed in the further course.
申请公布号 WO2009046468(A3) 申请公布日期 2009.08.20
申请号 WO2008AT00349 申请日期 2008.09.30
申请人 AT & S AUSTRIA TECHNOLOGIE & SYSTEMTECHNIK AKTIENGESELLSCHAFT;MOSER, CHRISTOPH;MARELJIC, LJUBOMIR 发明人 MOSER, CHRISTOPH;MARELJIC, LJUBOMIR
分类号 H05K1/02;H05K3/00 主分类号 H05K1/02
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