MEMS CANTILEVER STRUCTURE WITH WAVE SHAPE AND METHOD FOR MANUFACTURING THEREOF

摘要

An MEMS cantilever structure having a cross section of a wave shape and a manufacturing method thereof are provided to prevent deformation of a motion plate by increasing durability of the motion plate. A support is included on a top surface of a substrate(10). One or more through holes are formed in a boundary of a motion plate(120). A sub plate(130) is formed in order to form a wave shape in a cross section of the boundary side. The through hole has a rectangular shape. A length of the sub plate is shorter than a length of the through hole. The through hole is formed into a longitudinal direction of the motion plate, and has a rectangular shape.