| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow channel structure and its manufacturing method for restraining deformation of a flow channel due to heating and pressurization in lamination. <P>SOLUTION: On the surface of the flow channel structure 10 having a flow channel 14 formed inside as a plurality of substrates 1 to 6 are laminated, each of at least two substrates 1, 6 out of the plurality of substrates 1 to 6 includes a support layer (a copper foil 7, 8), respectively, covering its surface. <P>COPYRIGHT: (C)2009,JPO&INPIT |
