| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stepper capable of suppressing the adhesion of liquid on the backside of a substrate and suppressing the occurrence of exposure failure. <P>SOLUTION: The stepper exposes the substrate to exposure light via a liquid. The stepper has a cover member. The cover member has a first surface that opposes at least one portion of a peripheral region on the surface of the substrate with a first gap. <P>COPYRIGHT: (C)2009,JPO&INPIT |
