| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-axial magnetic sensor module of low price and high convenience by integrating an interface circuit IC and a magnetic resistance sensor using an inexpensive and easy-to-handle material and providing a constitution allowing stable temperature correction. SOLUTION: A plurality of magnetic sensor elements formed of a magnetic substance magnetic resistance object are disposed on a surface inclined to a substrate surface formed on a part of the back surface of a semiconductor substrate, a magnetic sensor element having a magnetic material shield film and a magnetic sensor element having no magnetic material shield film that are formed on the same plane are paired, and magnetic resistance variation is detected differentially. A magnetic field component perpendicular to a semiconductor substrate is determined stably. COPYRIGHT: (C)2009,JPO&INPIT
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