| 摘要 |
PROBLEM TO BE SOLVED: To provide a digitally-reading angle sensor for increasing the dynamic range of a fine angle sensor, and to improve the stability of a sensor output. SOLUTION: An object beam is divided into two sections in the sensor; and after passing the same optical path length, the two beams are allowed to enter an interference surface at a prescribed crossing angle, and an interference fringe in a spot generated by overlapping both spots is used as a scale. When the incident angle of the object beam into the sensor is changed, the spot on the interference surface is moved, in proportion to its fine angle displacement, while maintaining the interference fringe, and the interference fringe inside the spot shows an effect similar to that of scale movement in an encoder. COPYRIGHT: (C)2009,JPO&INPIT
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