| 摘要 |
PROBLEM TO BE SOLVED: To provide a multichamber heat treatment furnace which can miniaturize its cooling chamber, thereby reduces an amount of a cooling gas to be used, also makes the cooling gas uniformly flow, and imparts a desired material quality to an article to be treated. SOLUTION: This heat treatment furnace includes: a heating chamber 10 that can heat the article W to be treated which has been carried into the inner space that can be sealed up, under a reduced pressure; the cooling chamber 20 that can cool the article W to be treated which has been carried into the inner space that has one opening 31b for moving the article W to be treated and can be sealed up and depressurized, with the cooling gas under a reduced pressure; and a transfer chamber 30 that has a transportation path 45 which is formed toward the inside of the heating chamber 10 and the inside of the cooling chamber 20 and a transportation device 46 for moving the article W to be treated along the transportation path 45 installed in the inner space that can be sealed up and depressurized. COPYRIGHT: (C)2009,JPO&INPIT
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