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发明名称
ZUSAMMENSETZUNG ZUM BILDEN EINES SILIZIUMFILMS UND VERFAHREN ZUM BILDEN EINES SILIZIUMFILMS
摘要
申请公布号
DE60328302(D1)
申请公布日期
2009.08.20
申请号
DE2003628302
申请日期
2003.08.15
申请人
JSR CORP.
发明人
MATSUKI, YASUO;IWASAWA, HARUO;KATO, HITOSHI
分类号
H01L21/208;C23C24/10;C23C26/02;H01L31/09;H01L31/18
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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