| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator in which the short circuit between an upper electrode layer and a lower electrode layer is prevented and the reduction of the driving force of the actuator is prevented, and to provide a method of manufacturing the actuator. <P>SOLUTION: The actuator is so composed that lower electrode layers 5A to 5D, and piezoelectric element layers 6A and 6B are successively laminated in a predetermined region on a base member 4, further a body part 2 is held tilted by a predetermined angle, a piezoelectric element layer 25 composed of an insulation body such as PZT is further laminated from the side face direction of the base member 4, thereafter the body part 2 is returned to a horizontal position, and the upper electrode layers 7A to 7D are laminated on the piezoelectric element layers 6A, 6B and 25, thus the short circuit between the upper electrode layer and the lower electrode layer is prevented. <P>COPYRIGHT: (C)2009,JPO&INPIT |
