发明名称 METHOD FOR MANUFACTURING PERIODIC POLARIZATION REVERSAL STRUCTURE
摘要 PROBLEM TO BE SOLVED: To provide a method capable of preventing connection of adjacent polarization reversal part and forming periodic polarization reversal structure in short time when forming the periodic polarization reversal structure by a voltage application method. SOLUTION: There are provided an insulating film 7 with a plurality of clearances provided on a main face 1a of a ferroelectric single crystal substrate 1, and a conductive film 20 provided to coat the clearances 8 of the insulating film 7 and the insulating film. The conductive film 20 includes an insulating film coating part 6 for coating the insulating film, and electrode piece parts 5 provided in the clearances. The electrode piece parts 5 are arrayed under the condition separated from each other toward a polarization reversal direction x. The conductive film 20 includes a notched part 21 extending toward the polarization reversal direction x. The notched part 21 passes through the plurality of clearances 8. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009186634(A) 申请公布日期 2009.08.20
申请号 JP20080024839 申请日期 2008.02.05
申请人 NGK INSULATORS LTD 发明人 FUJIMURA RYO;YAMAGUCHI SHOICHIRO;YOSHINO TAKASHI
分类号 G02F1/37 主分类号 G02F1/37
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