| 摘要 |
PROBLEM TO BE SOLVED: To provide a distribution method of a liquid material which can moderate the distribution amount of the liquid material on a substrate even when the use frequency of a nozzle differs between a region of the end part of the substrate and any other region. SOLUTION: This distribution method of the liquid material is to distribute the liquid material to a plurality of specified regions set on the substrate by discharging the liquid material from a plurality of nozzles while relatively scanning a discharge head with a plurality of nozzles and the substrate. The use frequency of the nozzle at the discharge head when distributing the liquid material in a specified region for the end part of the substrate, happens to be lower than the use frequency of the nozzle when distributing the liquid material in the specified region other than the end part of the substrate. In such a case, the distribution amount of the liquid material to the specified region of the end part is increased, as compared with the distribution amount of the liquid material to the specified region other than the end part. COPYRIGHT: (C)2009,JPO&INPIT
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