| 摘要 |
A piezoelectric element substrate is provided with a support substrate, an insulating orientation auxiliary layer formed on the support substrate, a lower electrode layer formed on the orientation auxiliary layer so that an uncoated portion where the orientation auxiliary layer is not coated with the lower electrode layer is constituted at least a portion thereof, a piezoelectric substance layer formed on the lower electrode layer and the uncoated portion of the orientation auxiliary layer, and an upper electrode layer formed on the piezoelectric substance layer, wherein the orientation auxiliary layer and the piezoelectric substance layer comprise a material of the same crystal system.
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