| 摘要 |
A method of measuring a front surface profile and a back surface profile of a target object includes: mounting the target object in such a posture that a first measuring surface (front surface) is measurable by a probe; first measuring a contour of the target object; measuring the first measuring surface of the target object; reversing the target object; second measuring the contour of the target object with the reversed posture of the target object being maintained; obtaining a measurement position of a second measuring surface by comparison of contour data obtained through the first and second measuring of the contour, the measurement position of the second measuring surface corresponding to a measurement position of the first measuring surface at which the measuring of the first measuring surface is conducted; and measuring a profile of the second measuring surface along the obtained measurement position of the second measuring surface.
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