| 摘要 |
Blanking by a blanking control unit is eliminated by making the tangential direction movement velocity of the substrate and the deflection velocity of the beam faster in the segment, in which the recording pattern is sparse, and making and slower in segments, in which it is dense. In this case, in segment in which it is desired to form a recording pattern thicker in the radial direction, a thick recording can be realized by setting the recording velocity by the recording velocity setting means to be slower, and in the case where is substantially constant, setting to be relatively slower, than in the segments.
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