PLASMA TREATMENT APPARATUS

摘要

A plasma processing apparatus is provided to effectively observe a plasma property inside a process chamber by installing a mobile camera lens and a display unit connected to a camera lens inside a viewport. A process is performed on a substrate by generating plasma inside a process chamber of vacuum state. A viewport(160) confirms a property of plasma generated inside the process chamber. The viewport includes at least one through hole(161), a camera lens, and a driving unit(180). At least one through hole is formed in at least one among walls which form the process chamber. The camera lens is included in the through hole. The driving unit moves directions of the camera lens. A display unit(192) is electrically connected to the camera lens, and displays a shape inside the process chamber.