| 摘要 |
An evacuating head and a vacuum evacuating apparatus are provided to precisely move an evacuating head by sealing a gap between a tip tube and an insertion room of the tip tube after expanding an expansion sealing ring by water pressure of cooling water. A tip tube(4) is inserted to an insertion room(5) of the tip tube. An expansion sealing ring(7) seals a gap between the tip tube and the insertion room of the tip tube. A jacket(8) surrounds the insertion room of the tip tube. A vacuum evacuating channel(11) evacuates a gas inside the insertion room of the tip tube. A cooling water supply channel(12) supplies cooling water to the jacket. A cooling water evacuating channel(13) evacuates the cooling water from the jacket.
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