PRODUCTION OF A PIEZOELECTRIC AND PYROELECTRIC THIN FILM ON A SUBSTRATE

摘要

In the application of piezoelectric or pyroelectric thin-film layer on a substrate, a polymer is dissolved in an first organic solvent to produce a polymer solution. In a second operation a ceramic powder suspension created by suspending a hydrophobic, piezo- or pyroelectric ceramic powder of grain size less than 1 mm in a second organic solvent compatible with the first. - The ceramic powder suspension and polymer solution are combined to a composite slurry that is then applied to a substrate then dried at 100 deg. C, followed by subsequent treatment at less than 100 deg. C. The two components are mixed in a ratio in which finished layer has a solid content of at least 80 mass% ceramics. The Si-MEMS substrate is a silicon-based micro-mechanical system. The ceramic powder is lead zirconia titanate (PZT). The polymer is polymethyl methacrylate (PMMA). Alternatively, the polymer is a piezo-electric polymer e.g. PVDF.