发明名称 |
SPIN-POLARIZATION ION BEAM GENERATOR, SCATTERING SPECTROSCOPE USING THE SPIN-POLARIZATION ION BEAM, AND SPECIMEN PROCESSING DEVICE |
摘要 |
A spin polarized ion beam generation apparatus (30) can efficiently generate a spin polarized ion by using a pumping light generator (33) to an ion in a high frequency discharge tube (15) to irradiate optical pumping (33,34) by circularly polarized light and linearly polarized light orthogonal to each other to a metastable atom. For example, a polarized helium ion beam having a spin polarization rate that exceeds 18% and that is as high as 25% can be generated. The spin polarized ion beam generation apparatus (30) also can be applied to a processing apparatus and an analysis apparatus that can irradiate a polarized ion beam to a specimen. According to the spin polarized ion scattering spectroscopy apparatus, the spin status in a region at a depth of about 2 to 3 atomic layers from the surface of the specimen can be measured while discriminating the elements from the atomic layer with a reduced measurement time and with a high accuracy impossible in the conventional technique. |
申请公布号 |
EP2091306(A1) |
申请公布日期 |
2009.08.19 |
申请号 |
EP20070832821 |
申请日期 |
2007.11.29 |
申请人 |
JAPAN SCIENCE AND TECHNOLOGY AGENCY |
发明人 |
SUZUKI, TAKU;YAMAUCHI, YASUSHI |
分类号 |
H01J27/18;G01R33/28;H01J27/24;H01J37/08;H01J37/252 |
主分类号 |
H01J27/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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