| 摘要 |
A piezoelectric/electrostrictive element with improved moisture resistance while having less degradation in its piezoelectric/electrostrictive properties and a method of manufacturing such a piezoelectric/electrostrictive element are provided. A laminated vibrator (110) of a piezoelectric/electrostrictive element (10) has a structure in which an electrode film (112), a piezoelectric/electrostrictive film (114), another electrode film (116), another piezoelectric/electrostrictive film (118), and another electrode film (120) are laminated one above the other. In the manufacture of the piezoelectric/electrostrictive element (10), the laminated vibrator (100) and a counter electrode (162) are immersed in an electrodeposition coating fluid (164) containing an insulator coating component so that the electrodeposition coating fluid (164) is brought into contact with the surfaces of the laminated vibrator (100) and the counter electrode (162). Thereafter, voltage is applied between an internal electrode film (134) and the counter electrode (162) to induce electrophoresis of the coating component (128) toward a surface-exposed defect (154), whereby the coating material is selectively electrodeposited on the surface-exposed defect (154). |
