发明名称 |
Electron beam observation device using a pre-specimen magnetic field as image-forming lens and specimen observation method |
摘要 |
An electron beam observation device includes a mechanism which disposes a specimen at an upstream side in an electron beam traveling direction outside an objective lens, from which an image is transferred under a magnification of 1/5 to 1/30, in addition to an inside of the objective lens in which a specimen is disposed at a time of ordinary observation.
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申请公布号 |
EP2091063(A2) |
申请公布日期 |
2009.08.19 |
申请号 |
EP20080019777 |
申请日期 |
2008.11.12 |
申请人 |
HITACHI LTD. |
发明人 |
KASAI, HIROTO;HARADA, KEN |
分类号 |
H01J37/26;H01J37/141;H01J37/20 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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