发明名称
摘要 A Lamb wave type high frequency device comprises: a piezoelectric substrate (20); an interdigital transducer (IDT) electrode (30) formed on a first main surface of the piezoelectric substrate; a reinforcing substrate (50) connected to a second main surface of the piezoelectric substrate; a space portion (54) formed in one of the piezoelectric substrate and the reinforcing substrate, an area of the space portion being larger than a region in which a Lamb wave is propagated; and a connecting surface (52) formed in a periphery of the space portion.
申请公布号 JP4315174(B2) 申请公布日期 2009.08.19
申请号 JP20060209507 申请日期 2006.08.01
申请人 发明人
分类号 H03H9/25;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/23;H01L41/312;H01L41/313;H01L41/337;H03H3/08 主分类号 H03H9/25
代理机构 代理人
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