发明名称 |
TEM with aberration corrector and phase plate |
摘要 |
The invention relates to a TEM with a corrector (330) to improve the image quality and a phase plate (340) to improve contrast. The improved TEM comprises a correction system completely placed between the objective lens and the phase plate, and uses the lenses of the corrector to form a magnified image of the diffraction plane on the phase plate. |
申请公布号 |
EP2091062(A1) |
申请公布日期 |
2009.08.19 |
申请号 |
EP20080151369 |
申请日期 |
2008.02.13 |
申请人 |
FEI COMPANY |
发明人 |
TIEMEIJER, PETER;DE JONG, ALAN |
分类号 |
H01J37/153;H01J37/26 |
主分类号 |
H01J37/153 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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