发明名称 TEM with aberration corrector and phase plate
摘要 The invention relates to a TEM with a corrector (330) to improve the image quality and a phase plate (340) to improve contrast. The improved TEM comprises a correction system completely placed between the objective lens and the phase plate, and uses the lenses of the corrector to form a magnified image of the diffraction plane on the phase plate.
申请公布号 EP2091062(A1) 申请公布日期 2009.08.19
申请号 EP20080151369 申请日期 2008.02.13
申请人 FEI COMPANY 发明人 TIEMEIJER, PETER;DE JONG, ALAN
分类号 H01J37/153;H01J37/26 主分类号 H01J37/153
代理机构 代理人
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