OXYGEN PARTIAL-PRESSURE CONTROL UNIT

摘要

The oxygen partial pressure control unit includes a gas purification section for purifying the gas having the oxygen partial pressure controlled within a range of from 0.2 to 10 -30 atm, and a tank for storing the purified gas produced by the gas purification section. The purified gas stored within the tank is supplied to the another unit. The oxygen partial pressure control unit includes a circulation circuit including the tank and the gas purification section. The gas filled in the tank 20 is caused to circulate along the circulation circuit, and the purified gas produced by the gas purification section is stored in the tanka.