METHOD AND APPARATUS FOR POLISHING OBJECT

摘要

A method and an apparatus for polishing an object are provided to effectively remove irregularity of an object by forming a line having a flat surface without a scratch. A polishing pad(50a) and an object are moved at a first relative speed. A first polishing unit(24a) includes a polishing device having a diameter smaller than a diameter of the object. A first polishing step is performed by pressurizing the polishing pad of the polishing device(52a) about a surface of the object with first pressure. The polishing pad used in the first polishing step has a diameter smaller than a diameter of the object. A polishing pad(50b) used in a second polishing step has a diameter larger than a diameter of the object.