Flexure type accelerometer and method of making same

摘要

A proof mass (122) for flexure type, magnetic and capacitance circuit accelerometer includes one or more standoff pads (156) integrally formed on a fused silica paddle (136), such as being etched or patterned on the fused silica paddle. Further, the standoff pads have a thickness sufficient to locate at least a portion of one active coil in proximity to or even within a linear flux region of a magnetic circuit of the accelerometer. As such, the proof mass is configured to function with the magnetic circuit in a consistent and stable manner over a selected operational life of the accelerometer.