Substrate cleaning liquid media and cleaning method,申请号EP20020025606-传众专利搜索

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发明名称	Substrate cleaning liquid media and cleaning method
摘要
申请公布号	EP1342777(B1)	申请公布日期	2009.08.19
申请号	EP20020025606	申请日期	2002.11.18
申请人	MITSUBISHI CHEMICAL CORPORATION	发明人	MORINAGA, HITOSHI;MOCHIZUKI, HIDEAKI;ITOU, ATSUSHI
分类号	B08B3/08;C11D11/00;B08B3/10;B08B3/12;C11D1/29;C11D1/44;C11D1/72;C11D1/722;C11D3/02;C11D3/26;C11D3/37;C11D3/39;C11D17/08;C23G1/18;H01L21/304;H01L21/306	主分类号	B08B3/08
代理机构		代理人
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地址

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