VERFAHREN ZUR MASKENINSPEKTION IM RAHMEN DES MASKENDESIGNS UND DER MASKENHERSTELLUNG,申请号AT20060706655T-传众专利搜索

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发明名称	VERFAHREN ZUR MASKENINSPEKTION IM RAHMEN DES MASKENDESIGNS UND DER MASKENHERSTELLUNG
摘要
申请公布号	AT438886(T)	申请公布日期	2009.08.15
申请号	AT20060706655T	申请日期	2006.02.04
申请人	CARL ZEISS SMS GMBH;SYNOPSYS GMBH	发明人	HARNISCH, WOLFGANG;ZIBOLD, AXEL;BOEHM, KLAUS;KALUS, CHRISTIAN;SCHMOELLER, THOMAS
分类号	G03F1/00;G03F7/20	主分类号	G03F1/00
代理机构		代理人
主权项
地址

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