| 摘要 |
The invention relates to a rotation rate sensor comprising a first and a second Coriolis element (100, 200) that are disposed side by side across the surface (1) of a substrate. Said Coriolis elements (100, 200) are induced to oscillate parallel to a first axis (Y). The Coriolis elements (100, 200) are deflected in a second axis (X) that is perpendicular to the first axis (Y) through the effect of a Coriolis force. The oscillations of the first and second Coriolis elements (100, 200) proceed in antiphase on trajectories that, without the effect of a Coriolis force, are two parallel straight lines. ® KIPO & WIPO 2009
|
