| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure in which the intensity of vacuum ultraviolet rays is made uniform on an emission face of a discharge vessel in an excimer lamp of which the discharge vessel has a rectangular shape. SOLUTION: The excimer lamp is composed of a lengthy discharge vessel (10) having a rectangular cross-section which is made of a dielectric material for transmitting the vacuum ultraviolet rays, discharge gas for excimer light emission which is sealed into the interior of this discharge vessel (10), and an electrode (11) formed on the outer face of the discharge vessel (10). The discharge vessel (10) has a smoothing film (12) formed by coating alkoxide on the inner wall face of the discharge space side corresponding to a part at which the electrode (11a) is formed. COPYRIGHT: (C)2009,JPO&INPIT
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