METHOD FOR PRODUCING SPHERICAL SILICON CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a spherical silicon crystal by which the spherical silicon crystal containing a low supercooling degree type crystal in a high ratio can be obtained with good reproducibility. SOLUTION: The method for producing the spherical silicon crystal includes a process for heating and melting a silicon material kept in a vessel, a process for adding a fine powder of AlP to the molten silicon material, and a process for allowing droplets of the molten silicon material containing the fine powder of AlP to fall into a vapor phase from the vessel. COPYRIGHT: (C)2009,JPO&INPIT