| 摘要 |
A placing table includes a placing surface on which a substrate is placed; a suction unit which sucks the substrate to the placing surface; a separation unit which separates the substrate from the placing surface; and a rotation unit, being a part of the placing surface and rotating about a vertical axis with respect to the placing surface. In the table, the suction unit sucks the substrate to the placing surface at the rotation unit and the separation unit separates the substrate from a part of the placing surface excluding the rotation unit if the rotation unit is rotated.
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